COR-RS – HIGH PRECISION ROTARY ACTUATORS
The Rotary Actuators of the COR-RS line of Phi Drive incorporate a piezoelectric technology and flexure mechanisimes that allow to reach high performances with a high level of customizations.
The rotary tables of Phi Drive can reach nanometric and/or nanoradiant resolution and are suitable for applications requiring high precision such as: microscopy, semiconductor production, biotechnology, medical engineering and industrial automation.
Reaching sub-nanometric shift is simple but is often limited by the presence of external disturbance, for this reason the electronics inside the rotary tables of Phi Drive is studied ad hoc by our engineers to minimize the noise and therefore increase its robustness.
Main features COR-RS
- +/- 360° rotation
- High angular resolution
- Customization: performance and dimensions
- Closed-loop control
- High Vacuum layout available
- Working in liquid environments
- Modular solution for multi-axis systems
For more information on Phi Drive rotary motor contact us.
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